高精度温度測定によるCZシリコン融液挙動の推定(<特集>バルク成長)

概要

論文の詳細を見る
Precise in-situ multi-point measurement on the temperature of silicon melts has been carried out during crystal growth in CZ furnace of production size. Fourier analyses of the temperature data for 35 Kg melts show no specific frequency which has been predicted to exist due to a laminar flow by many computer simulation experiments. Two-body-correlation-functions of temperarture among several points in the melts indicate that the laminar flow, if exists, has small contribution to a heat transfer. Effective heat transfer from the crucible wall to the crystal-melt boundary layer in the melts changes drastically owing to a crucible rotation. In conclusion, a turbulent flow is proposed as the most effective factor for the heat transfer and dominant component of the flow.
日本結晶成長学会の論文
1991-02-15