1513 触媒 CVD 法による単層カーボンナノチューブの低温高純度生成

概要

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We have demonstrated the high-quality and low-temperature generation of single-walled carbon nanotubes (SWNTs) by utilizing gas phase alcohols (methanol and ethanol) over iron and cobalt catalytic metal particles supported with zeolite. SWNTs were observed by SEM and TEM, and analyzed by Raman spectroscopy. Raman spectra revealed that the diameter of SWNTs had the dependency on the generation temperature and gas flow rate. In order to create nanotube devices, we tried to generate SWNTs on a silicon wafer. Very small amount of Fe/Co supported with zeolite particles was located on a silicon wafer, and SWNTs were generated by catalyst chemical vapor deposition (CCVD) technique from ethanol at 900℃. SWNTs on a silicon wafer were generated from the surface of zeolite particles and the bundles of SWNTs were running on the silicon surface.
社団法人日本機械学会の論文
2002-09-20