PW-05 STUDY ON EXHAUST SYSTEM IN AEROSTATIC THRUST BEARINGS FOR HIGH VACUUM CHAMBER
スポンサーリンク
概要
- 論文の詳細を見る
This paper theoretically investigates the performance of the seal system of aerostatic thrust bearings used in a high vacuum chamber. This thrust bearing has several stages of viscous seals and exhaust grooves around it. Each exhaust groove is connected to a separate vacuum pump in order to achieve a vacuum chamber pressure of less than (10)^3 Pa. The vacuum chamber pressure is affected by various design parameters such as seal gap, seal length and conductance of exhaust tubes. In this paper, the influences of these design parameters on the vacuum chamber pressure are discussed.
- 一般社団法人日本機械学会の論文
著者
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Yoshida Yuichi
Department Of Dermatology Kyushu University Faculty Of Medicine
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Yagi Kazuyuki
Department Of Mechanical Engineering Faculty Of Engineering Tokyo University Of Science
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Yagi Kazuyuki
Department Of Environmental Management National Institute Of Agro-environmental Sciences
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YOSHIMOTO Shigeka
Department of Mechanical Engineering, Faculty of Engineering, Tokyo University of Science
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Yoshimoto Shigeka
Department Of Mechanical Engineering Faculty Of Engineering Tokyo University Of Science
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Yoshida Yuichi
Department Of Mechanical Engineering Faculty Of Engineering Tokyo University Of Science
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Yoshida Yuichi
Department Of Bioresources Chemistry School Of Horticulture Chiba University
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