201 レーザ干渉計と三次元振動台による三軸加速度センサの三次元加速度センサとしての校正法

概要

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This paper describes the system for the calibration of accelerometers using a three-dimensional vibration generator and laser interferometers. The vibration generator of electro-dynamic type, IMV TS-1030S can generate motion with the arbitrary direction in the three-dimensional coordinate system under sinusoidal, random and shock operation mode. It has five actuators in total, two actuators each for X-axis and Y-axis and one for Z-axis motion. Motion of the table is monitored during the operation by the three piezo-accelerometers BK 4393. The signal from them is used for the control of the table, feed forward and feed back. Motion of the table in three-dimensional space is measured by three laser interferometers, Neoark MLD301K. The sensitivity of an accelerometer is defined in the form of a matrix including the cross sensitivity. Size of the matrix is 1 x 3,2 x 3 and 3 x 3 for one-axis accelerometer, two-axis accelerometer and three-axis accelerometer, respectively. Since acceleration is a vector quantity, input signals and output signals of an accelerometer make a vector space. An accelerometer is mathematically a device executing a mapping between two vector spaces. This system realizes this concept in the form of a real system for the matrix calibration.
社団法人日本機械学会の論文
2003-06-04