TED-AJ03-607 MICRO FLUID CONTROL DEVICE USING SURFACE PROPERTIES
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概要
- 論文の詳細を見る
Recently MEMS (MicroElectroMechanical Systems) devices are used in many fields such as aerospace, medical area and consumer products. Particularly the control of fluid in microchannels, which is several hundreds μm in width, is important on account of application to micro-reactor or micro-heat-pipe and so on. The structure of the device for pumping or mixing fluid is required to be simple. Movable parts or complex components are not desirable for some reasons. The structures of them are so complicated generally that the fabrication process becomes more complex, and cost becomes high. And the movable structure is so breakable that the reliability of the device falls. In this paper, a new device is proposed for realizing both driving and mixing of fluid by simple structure. Electroosmotic flow (EOF) is well known, and widely used method for driving fluid in microchannels. In this study, it is discussed about the usefulness of EOF for not only driving but also mixing microfluid. The schematic is shown in Fig. A-1. EOF velocity or direction is determined by interaction [figure]of interface between liquid and solid surface. The main factor determining EOF velocity is isoelectric point (IEP) of solid surface. IEP is a unique value for each oxide surface. If the wall of channel is partly changed to the other oxide that has different IEP, EOF velocity is changed there purposely. Using this technique, mixing and driving microfluid at once is possible. And the simplicity of its structure and fabrication process is advantageous for device reliability and cost reduction. In this paper, a set of microchannel is shown in which EOF moves toward opposite direction under same condition (Fig. A-2). One of microchannel has SiO_2 surface (IEP=2), and another has Al_2O_3 surface (IEP=9). The EOF velocities in these channels were reasonable. Based on the experimental results, numerical simulation to evaluate mixing ability of the system was conducted. The SiO_2 channel with partly changed to Al_2O_3 surface was also fabricated with surface micromachining. To realize effective mixing during driving, further investigation is required.[figure]
- 一般社団法人日本機械学会の論文
著者
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Okazaki Ken
Department Of Innovative Medical Technology Graduate School Of Medical Sciences Kyushu University
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Fushinobu Kazuyoshi
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Nakata Masashi
Department Of Medicine Iii Kurume University School Of Medicine
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Nakata Masashi
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Okazaki Ken
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Okazaki Ken
Department Of Energy Engineering Toyohashi University Of Technology
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