420 バイオマイクロアクチュエータ用薄膜材料の創成と機能評価(GS-3 マイクロ材料と計測)

概要

論文の詳細を見る
Titanium (Ti) thin films on glass and Pb(Zr-Ti)O_3 (PZT) substrates were prepared using magnetic RF and DC sputtering apparatuses. To study the influence of Ti thin layer on piezoelectric properties, nano indentation tests were carried out. The piezoelectric properties were also measured in cases of PZT plate and Ti sputtered one. Furthermore, some characteristics, such as crystalline structure, depth profiles, surface roughness of the films, were observed by means of an atomic force microscope (AFM). Main conclusions thus obtained in this study are summarized as follows; (1) From detailed observation and analytical results of AFM, the surface roughness, Ra tends to increase as the Ti film thickness is increased. (2) Several mechanical properties such as reduced modulus and hardness obtained from nano indentation tests are significantly related to the film thickness. (3) As received PZT specimen and Ti layer sputtered specimen show both the piezoelectric properties. From experimental and analytical results show that Ti layer affects very much on the piezoelectric coefficient.
社団法人日本機械学会の論文
2001-03-16