エッチング過程の二次元可視化実験とシミュレーション

概要

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The etching process is investigated using the two-dimensional experiment and the Monte Carlo simulation. The quasi-two-dimensional etching of aluminum plate from NaCl aqueous solution is achieved through a Hele-Show cell under an applied electric field. The time evolution of etching surface on the aluminum plate is analyzed by the two-dimensional technique. The transport equation of anions governing the etching process is shown. The transport phenomena (diffusion and migration) and the surface reaction are taken into account as the multiparticle Brownian motion with drift and the reaction probability. The etching process is simulated by the multiparticle Monte Carlo method. It is shown that the simulation result is nearly consistent with the experimental result.
社団法人日本機械学会の論文
1998-07-25