分子線による気体分子-固体表面間相互作用の解析 : 第1報, 気体分子のIn-planeとout-of-planeにおける散乱挙動 (<小特集>マイクロスケールの流体・熱流動現象)

概要

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The experiment of a gas molecule scattering from a clean graphite surface is performed using the molecular beam technique. The molecular beam experiment is performed in the ultra high vacuum molecular beam scattering system. The supersonic molecular beam is produced in a three stage differentially pumped vacuum system by expansion of gas through a nozzle. In the second stage of the beam line, a rotating disc chopper is mounted to do time of-flight measurements. The base pressure in the main chamber where the graphite is placed is 3.7×10^<-7>Pa (2.8×10^<-9> Torr). The graphite sample is mounted on a six-axis manipulator. The scattered molecule is detected by a rotatable quadrupole mass filter detector. By using the manipulator and the detector, the in-plane and out-of-plane scattering of a gas molecule can be measured.
社団法人日本機械学会の論文
1999-02-25