回転基板上の液膜流に発生する模様に関する研究

概要

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Uniformly making a liquid film on a rotating substrate is of great practical importance. However, despite its frequent use in practical processes, the liquid film on a large-size substrate has never been examined. We have thus visualized the flow patterns of a liquid film on a large-size substrate (650mm×830mm). There are two kinds of flow patterns on the liquid film : a turbulent-transition flow pattern or a striped flow pattern. We measured the effects of the change of kinematic viscosity of the liquid, the flow rate of the nozzle, and the angular velocity of the substrate on the striped flow pattern. Moreover, we devised a new equation to predict the onset point of the striped flow pattern. And it was found that the predicted onset point agrees well with the measured one.
社団法人日本機械学会の論文
2000-10-25