LSI製造クリーンルーム用搬送装置

概要

論文の詳細を見る
64 Kbit RAM mass-production indicates the beginning of VLSI age. And moreover, 256 Kbit RAM is being shipped. It is needed to achieve a high-cleanliness production environment and to accomplish a total process automation for the increase of VLSI products. This paper deals with a low dust carriage system for LSI wafer transfer. The great part of dust is caused by power collector mechanism and drive mechanism on an usual carriage. Then, the power collector mechanism and the drive mechanism were investigated. The investigation revealed that a low dust carriage system was able to be realized by the adoption of a rolling contact type collector and a flexible steering mechanism.
社団法人日本機械学会の論文
1986-01-25