機器・テーブル系の弾性振動を考慮したアクティブ微振動制御手法の研究

概要

論文の詳細を見る
In manufacturing and research facilities which require a very low vibration environment. the active microvibration control system has already reached the stage of practical application. The next subject of research lies in enhancing the robust stability and vibration isolation performance under practical USe. Such study ensures that the spillover phenomena due to the elastic equipment mounted on the table can be avoided by letting the controller design reflect the plant modeling. In this method of controller design, high-order equipment-table dynamics, which influences each modal plant, is shaped by a compensator, and its normalized coprime factor plant is represented in a reduced-order mathematical model. We prove the validity of this design method. Also in this paper. the model matching method and H^<∞> method are compared experimentally.
一般社団法人日本機械学会の論文
1997-09-25