積層形圧電素子の過渡応答

概要

論文の詳細を見る
Multilayered piezoelectric elements are capable of very quick response and very small displacement of about a micron, though their size is small and the structure is simple. Hence this device appears promising for such applications as the actuator for a precision stage or a micromachine. In this paper, the equation of motion of multilayered piezoelectric elements taking material damping into consideration is proposed and solved by Duhamel's method. Then the value of the material damping coefficient is estimated experimentally. The calculated results are in good agreement with the experimental results.
一般社団法人日本機械学会の論文
1996-07-25