ステレオマッチング法と二次電子信号積分法を組合せたSEM破断面三次元測定

概要

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3-dimensional analysis of fracture surface using SEM (Scanning Electronics Microscope) is inevitable to clarify the cause of fracture. It is popular and effective to obtain fracture surface profile by stereo matching or by integrating secondary electron signals. The former method is advantageous because of its accuracy, and the latter method is advantageous because of its resolution; however, it is rather difficult to attain both accuracy and high resolution. Therefore, conventional methods cannot satisfy the accuracy of quantitative analysis in fractography. In this paper, a new method is proposed, which is the combination of the two methods. In this method, the height of stereo matching is revised with the inclinations measured by secondary electron signal intensity so as to lessen the error of stereo matching and obtain the real profile height of fracture surface. The error of proposed method is investigated and the results show that the method can improve the accuracy. A personal computer takes approximately six minutes to process one photograph.
一般社団法人日本機械学会の論文
2002-02-25