Performance of a Turbomolecular Pump in the Transition and Slip Flow Regimes

スポンサーリンク

概要

• 論文の詳細を見る

• The performance of a turbomolecular pump in the transition and slip flow regimes is studied theoretically with the following two new assumptions about intermolecular collision. (1) The molecular number density is uniform in the passage of a blade row regardless of location. (2) In the process of intermolecular collision, molecules entirely lose their memory about the direction in which they have been moving before collision. Then, the theoretical results are verified by the experiments on several rotors with various geometrical dimensions. The theoretical results show good agreement with the experimental ones, and it is confirmed that the theory can be applied to a wide pressure range from free molecule to slip flow regime.

• 一般社団法人日本機械学会の論文

著者

• Sawada Tadashi

  Mining College Akita University

• SAWADA Tadashi

  Mining College,Akita University

関連論文

• Vacuum Sealing with a Spiral Grooved Gas Dynamic Seal : Experimental Performance and New Sealing Coefficient for the Extremely Low Pressure Range
• Spiral Grooved Visco-vacuum Pump
• Analysis of TMP's Ultimate Pressure and Development of XHV-TMP and XHV-CMP
• Vacuum Sealing with a Spiral Grooved Gas Dynamic Seal
• Performance of a Turbomolecular Pump in the Transition and Slip Flow Regimes
• Blade Force Measurement and Flow Visualization of Savonius Rotors
• Study of the Pumping Performance of a Dry Scroll Vacuum Pump

スポンサーリンク