Analysis of TMP's Ultimate Pressure and Development of XHV-TMP and XHV-CMP
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概要
- 論文の詳細を見る
The ultimate pressure of a turbomolecular pump (TMP) depends on its backing pressure and compression ratio. Performance of TMP was analyzed, taking the out-gassing from TMP blades into consideration. A 250 L/s TMP and a 1100 L/s compound molecular pump (CMP) were designed based upon this theory and their performance was measured. The ultimate pressure was 5E-10 Pa, which is in the XHV region.
- 日本真空協会の論文
- 1994-09-20
著者
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Sawada Tadashi
Mining College Akita University
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IGUCHI Masashi
Osaka Vacuum, Ltd.
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OKAMOTO Masatomo
Osaka Vacuum, Ltd.
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Iguchi Masashi
Osaka Vacuum Ltd.
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Okamoto Masatomo
Osaka Vacuum Ltd.
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