Study of the Pumping Performance of a Dry Scroll Vacuum Pump

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概要

• 論文の詳細を見る

• The leak flow through clearances between the fixed and orbiting scrolls of a dry scroll vacuum pump is a dominant factor that determines the pumping performance. Because the leak flow sometimes ranges from viscous to slip to free molecule flow along a clearance, the equation that describes the flow through the three flow regimes is developed by a weighted linear combination of the two equations for free molecule and slip flows. The pressure distribution in gas pockets is another important factor in pumping performance. The validity of this theory is examined by experiments.

• 一般社団法人日本機械学会の論文
• 1998-02-15

著者

• Sawada Tadashi

  Mining College Akita University

• Takemoto Jun-ichi

  Anest Iwata Corporation

• Su Yu

  Mining College Akita University

• SUGIYAMA Wataru

  Mining College, Akita University

• HAGA Shuji

  ANEST IWATA Corporation

• Sugiyama Wataru

  Mining College Akita University

関連論文

• Vacuum Sealing with a Spiral Grooved Gas Dynamic Seal : Experimental Performance and New Sealing Coefficient for the Extremely Low Pressure Range
• Spiral Grooved Visco-vacuum Pump
• Analysis of TMP's Ultimate Pressure and Development of XHV-TMP and XHV-CMP
• Vacuum Sealing with a Spiral Grooved Gas Dynamic Seal
• Performance of a Turbomolecular Pump in the Transition and Slip Flow Regimes
• Blade Force Measurement and Flow Visualization of Savonius Rotors
• Study of the Pumping Performance of a Dry Scroll Vacuum Pump

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