窒素イオン注入処理された常圧焼結窒化ケイ素の摩擦・摩耗特性

概要

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In order to investigate the effect of surface modification by ion implatation on friction and wear properties of sintered silicon nitride, a series of ball on disc type friction and wear tests was carried out on the non-implanted and ionimplanted silicon nitride. Ion implatation changes the friction and wear properties of silicon nitride depending on the dose of ion implantation. The ion-implanted silicon nitride with low dose(1×10^<17>ions/cm^2)shows slightly low friction coefficient accompanying the oscillation of the coefficient, in comparison with the non-implanted silicon nitride. Also the ion-implanted silicon nitride with low dose shows low wear resistance ; the wear volume is greater than that of non-implanted silicon nitride. This suggests that the wear progresses in a weak wear resistance layer, i.e., the irradiation damaged layer. On the other hand, the ion-implanted silicon nitride with high dose(2×10^<17>ions/cm^2)shows extremely low friction coefficient during the early stage of rotation cycles, and in this stage the wear scarcely occurs.
社団法人日本材料学会の論文
1997-11-15