塗布熱分解法によるBYCO超伝導膜の合成における膜とYSZ基板との反応

概要

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The reaction between films and substrates was investigated by ICP-AES, SEM and XRD analyses, during the preparation of Ba_2YCU_3O_<7-σ>(BYCO) superconductor films from the precursor (BaCO_3-Y_2O_3-CuO) films coated on the yttria-stabilized zirconia (YSZ) substrates by the dipping-pyrolysis process. The reaction of the films with the YSZ substrates resulted in the formation of BaZrO_3 inside the substrates. Their reactivity increased (1) as the atmosphere was changed as : Ar < 0_2 < air, and (2) as the reaction temperature was raised. With the heat treatment above 900 ℃ in air or O_2, the formation of BaZrO_3 caused the depletion of Ba in the films, giving rise to the changes in film phases on the substrates as : BYCO → BaY_2CuO_5 + CUO → Y2Cu205 + CuO. On the other hand, poor reactivity between the films and the substrates was observed during the heat treatment in Ar at 930℃ or below. However, films heated at 950℃ resulted in BaZrO_3 and the mixture of Y_2 O_3 and Cu_2O, inside and on the YSZ substrates, respectively.
社団法人日本セラミックス協会の論文
1990-01-01