ポリマー含浸熱分解法によって作製した3次元炭素繊維/炭化ケイ素プリフォームへのパルスCVI法による炭化ケイ素の充填

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Preforms were prepared by PIP(Polymer Impregnation and Pyrolysis)processing using polycarbosilane to 3-dimensional orthogonal weave fabrics of pithch-based carbon fiber. Porous matrices of the preforms were still more filled with β-SiC by PCVI(Pressure Pulsed Chemical Vapor Infiltration)processing using source gas mixture of SiCl_4-CH_4-H_2 system to obtain dense 3-dimensional carbon fiber reinforced SiC matrix compoites(3D-C/SiC). In the PCVI process, influece of the processing conditions on densification of the matrices was in vestigated in detail. The PCVI filling up to 120000 pulses were carried out under various conditions with varying temperature, residence time and gas flow rate. Then the filling-ratio was evaluated from changes in density and prosity, and crystal-phases of deposits were identified by XRD. The filling-ratio and the phase of deposits varied with the PCVI processing conditions. The PCVI processing under the conditions of 1373 K in temperature, 1.5 s in residence time, 4 mol% each of SiCl_4 and CH_4 in molar-concentration and 80 kPa in total pressure gave the highest filling-ratio. In this case, the number of pulses and operating time neccessary for saturation of the filling-ratio were 60000 pulses and 192 ks, respectively. The porosity of the densest composite was about 6% from macrosurface to 0.5 mm in depth and less than 9% even to 1.5 mm in depth. Also, it was found that higher total pressure was effective for increasing filling-speed without increasing the porosity, but disadvantageous in the consumption of the source gases.
社団法人日本セラミックス協会の論文
2002-01-01

ポリマー含浸熱分解法によって作製した3次元炭素繊維/炭化ケイ素プリフォームへのパルスCVI法による炭化ケイ素の充填

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