無添加窒化ケイ素のガラスシール法・HIP焼結における不純物酸素の侵入

概要

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Highly pure Si_3N_4 powder without additives, sealed with a glass capsule using pure hBN powder as an insulation to be isolated from it, was treated by HIP under the condition that can be sintered and densified up to theoretical value. After HIP treatment, an oxygen content distribution in the inner parts of the glass capsule was analyzed. Oxygen content in; sintered Si_3N_4 was increased, on the other hand in hBN was decreased, as compared with their starting materials. Both the oxygen contents changed remarkably on a boundary between them. A sintered Si_3N_4 had the least oxygen content in the center. Oxygen content in hBN near Si_3N_4 was constant, and on the other place in hBN it was correlated by a distance from the surface of Si_3N_4 Therefore, it was concluded that the permeation of oxygen into Si_3N_4 from impurities in hBN was dominant, and that supply of oxygen from glass of the capsule was almost negligible.
社団法人日本セラミックス協会の論文
1990-09-01