SiC焼結体の電気伝導度に及ぼす成形圧力の影響

概要

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For application to electronic devices, the relationship between manufacturing conditions and electrical properties of SiC was investigated. High-p phase ,silicon carbide powder was formed into cylindrical pellet at various pressures between 50 MPa and 350 MPa, and was sintered at 2100℃ for 0.5h in a vacuum furnace. Electrical conductivity and relative density were measured, and microstructures were observed using a scanning electron microscope (SEM) . The electrical conductivity of specimens decreased from 8X10^<-5>S/m to 4X10^<-6>S/m with increasing the forming pressure from 50 MPa to 250 MPa. Whereas the density and the microstructure slightly depended on the forming pressure. For the specimens formed above the pressure of 250 MPa, the electrical conductivity and density showed constant value regardless of the forming pressure.
社団法人日本セラミックス協会の論文
1989-02-01