平面型限界電流式酸素センサを利用した高温用湿度センサ

概要

論文の詳細を見る
A Limiting current type plane oxygen sensor with a unique structure, different from the conventional limiting current type oxygen sensor, has been developed. This sensor has cathode and anode of Pt on the same plane of ZrO_2 electrolyte, and the cathode also serves as a hole to limit gas diffusion. An investigation was made to verify the humidity sensing characteristic of this sensor above 100℃. This sensor detects humidity linealy proportional to a water vapor pressure of 0 to 450 mmHg in a wide operation temperature range from 20° to 300℃. No deterioration was observed after 10,000 h life test.
1992-03-01