ゾル-ゲル法によるAl_2O_3,TiO_2,SnO_2を利用した湿度センサ

概要

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Ultra-fine paticles of Al_2O_3, TiO_2 and SnO_2 prepared by the sol-gel method for humidity sensing materials with an optimal porous structuture, a superior humidity sensing characteristics have been acquired in a humidity range of 10 to 95%RH and at an operation temperature of -20 to 100℃. The sensing mechanism of this humidity sensor utilizes the variation in proton conductivity in absorbed water. This mechanism has proved to be hard to use at temperatures above 100℃. Heat cleaning by a ceramic heater enables us to improve humidity sensors of high reliability and high precision. They are exellent in withstanding various corrosive environments over a long period.
1992-02-01