X-Ray Stress Measurement for <110>-Oriented TiC Films
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概要
- 論文の詳細を見る
In this study, we investigate the residual stress of titanium carbide films with the X-ray diffraction method.It is difficult to determine the stress by conventional X-ray stress measurement, i.e., the sin^2ψ technique, because the sin^2ψ technique requires macroscopic isotropy from the specimen but the <110> orientation is observed for our evaporated TiC films by chemical vapor deposition.Therefore, in this paper, the X-ray stress measurement for <110>-oriented films was formulated by introducing the weighted average method.The formulation showed that the relation between the stress of the specimen and the strain measured by X-ray diffraction depended on the measured diffraction planes.Then, a stress calculation was performed and discussed based on the loading experiments.
- 社団法人日本材料学会の論文
- 2000-12-15
著者
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Hirose Y
Department Of Computational Science Kanazawa University
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SASAKI Toshihiko
Department of Materials Science & Engineering, Kanazawa University
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HIROSE Yukio
Department of Materials Science and Engineering, Kanazawa University
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Hirose Y
Dept. Of Materials Science And Engineering Kanazawa Unvi.
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Ejiri Shouichi
Dept. of International Studies, Seisen Jogakuin College
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EJIRI Shouichi
Seisen Jogakuin College
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Juwen HE
Graduate student of Kanazawa University
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Sasaki T
Department Of Material Science And Engineering Kanazawa University
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Ejiri Shouichi
Dept. Of International Studies Seisen Jogakuin College
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Hirose Yukio
Department Of Computational Science Kanazawa University
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SASAKI Toshihiko
Department of Material Science and Engineering, Kanazawa University
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