OS4(P)-8(OS04W0091) A Comparison of X-ray Stress Measurement Methods for TiN Thin Films Having Fiber Texture near Single Crystal Structure
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Hirose Y
Department Of Computational Science Kanazawa University
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Hirose Y
Dept. Of Materials Science And Engineering Kanazawa Unvi.
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Gotoh Masahide
Graduate School of Natural Science & Tech., Kanazawa Univ.
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Ejiri Shouichi
Dept. of International Studies, Seisen Jogakuin College
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Sasaki Toshihiko
Dept. of Materials Science and Engineering, Kanazawa Unvi.
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Hirose Yukio
Dept. of Materials Science and Engineering, Kanazawa Unvi.
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Hirose Yukio
Dept. Of Materials Science And Engineering Kanazawa Univ.
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Sasaki T
Department Of Material Science And Engineering Kanazawa University
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Ejiri Shouichi
Dept. Of International Studies Seisen Jogakuin College
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Gotoh Masahide
Graduate School Of Natural Science & Tech. Kanazawa Univ.
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Sasaki Toshihiko
Dept. Of Materials Science And Engineering Kanazawa Univ.
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Sasaki Toshihiko
Dept. Of Materials Science & Engineering Kanazawa Univ.
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