Formation of Arrays of Straight Copper Wires on Solid Substrate by Electrodeposition : Condensed Matter: Structure, etc.
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概要
- 論文の詳細を見る
Straight copper wire arrays are electrochemically deposited on a silicon substrate without utilizing additives or templates. To suppress the influence of the factors which arouse the ramification of the copper electrodeposit, an ultrathin electrochemical deposition system and an initially homogeneous electric field are used. The width of the copper wires may vary from about 200 nm to about 1.5μm depending on the control parameters. The microstructure of the copper wires and their electric resistance after vacuum-annealing at 200℃ are studied. We suggest that this self-organized copper electrodeposition is helpful in gaining an understanding of the formation of dense-branching morphology. It also implies the potential application in microelectronics.
- 社団法人日本物理学会の論文
- 2001-06-15
著者
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Wang Yuan
Internal Medicine Fourth Affiliated Hospital Hebei Medical University
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WANG Mu
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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PENG Ru-Wen
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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MING Nai-ben
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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Peng R‐w
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Peng Ru-wen
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Ming Nai-ben
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Yin Xiao-bo
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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ZHONG Sheng
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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ZHU Jian-Ming
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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WANG Yuan
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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Wang Mu
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University:inte
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Wang M
National Laboratory Of Solid State Microstructrues And Department Of Physics Nanjing University
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Zhong Sheng
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Zhu Jian-ming
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Wang Mu
National Laboratory of Solid State Microstructrues and Department of Physics, Nanjing University
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