キャビテーション援用加工の基礎的研究 : ガラス表面の超精密基礎加工現象

概要

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The purpose of this research is to develop a cavitation aided machining which positively makes use of cavitation occurring in fluid for machining phenomenon. In this paper, a fundamental ultraprecision machining phenomenon of glass surface is made clear and its machining characteristics is experimentally investigated by analyzing surface finish, stock removal and cavitation impact. Then an efficiency of applying the cavitation aided machining as an ultraprecision machining is proved by carrying out ultraprecision surface machining on glass surface based on the machining phenomenon. Main conclusions obtained in this paper are as follows; (1) Cavitation aided machining can be applied to an ultraprecision machining by which the surface finish of glass is improved down to the surface finish at about 5.0nmRy by using abrasives of WA 4000. (2) WA abrasive grains generate finer machined surface than GC abrasives which is harder or AZ abrasives which is heavier. (3) Ultraprecision machined glass surface with 60mm in length is generated by applying a fundamental machining phenomenon of cavitation aided machining along flowing direction of machining fluid continuously.
社団法人精密工学会の論文
2001-12-05