くぼみ深さ測定方式の超微小硬度計による表面の評価(第3報) : AFMを用いた直接くぼみ測定による硬さとの比較

概要

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A hardness test is performed for pure gold using an ultra-micro hardness tester under a test load of 0.02-5.00 gf and a concavity shape is observed using an atomic force microscope. The concavity shape created by two kinds of indenters (Vickers type and triangular pyramid) after unloading is analyzed. The hardness from the width of concavity rim measured by an atomic force microscope is obtained and it is compared with the hardness from the concavity depth under test load and after unloading measured by an ultra-micro hardness tester. The results are as follows : (1) The shape of the permanent concavity rim created under a low test load by an indenter with a small tip radius is similar to that under high load; however, the shape created by an indenter with a large tip radius is different under a load that is lower than 0.1 gf. (2) The hardness from the width of concavity rim using indenters with a tip radius that is smaller than 0.560μm measured by an atomic force microscope is all the same and is independent of indenter shape or test load. (3) The hardness from the concavity depth is lower than the hardness from the width of concavity rim due primarily to sinking-in phenomena on the surface of pure gold. However both types of hardness have the same value only when a triangular pyramid indenter with the smallest tip radius of 0.100μm is used.
公益社団法人精密工学会の論文
1998-03-05