修正リング形ポリシングにおける形状生成過程(第1報) : 理論解析と平面制御

概要

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It is necessary for attaining highly fiat work surfaces to control the polisher surface so as to be flat at all times during polishing. The surface generation process of the work and conditioning ring has been investigated for conditioning ring type polishing with an elastic and wear polisher. A surface generation equation newly using the amount of gap has been derived. The surface shape generation of glass works and a pitch polisher was simulated. The results obtained are as follows. (1) The polisher flatness is maintained highly by a load control where the ratio of average pressure on the conditioning ring to that on the work is made larger, and there is an increased asymmetric load on the outer periphery of the polisher. (2) It is impossible to achieve convex polishing by controlling the rotating speed of the work and conditioning ring in relation to that of the polisher, but it is possible by controlling the average pressure ratio and asymmetric load. The coneshaped, saucer-shaped, concave and convex polishers are corrected to be flat by the latter control. (3) The point symmetrical and concave or convex works can be polished with a high degree of flatness by the load control, with keeping, the polisher surface fiat.
公益社団法人精密工学会の論文
1983-02-05