赤外合成波長による長尺ゲージの測定

概要

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Synthetic wavelength method is described for determining long lengths with a high accuracy and efficiency. The synthetic wavelengths, 84.2 μm and 464 μm, are produced by squaring and filtering the interference fringes derived from a two-wavelength simultaneous interferometer whose light sources are a 3.51- and 3.37-μm He-Xe laser and a 3.39-μm He-Ne laser. As concerns accuracies required in measuring long lengths, this method is discussed to be more useful than the method of excess fractions well known in length measurement. Several techniques also are given for measuring lengths accurately. Using the two-beam infrared interferometer, gauges of 0.8- and 3-m long were measured over several months. The standard deviation of the measured phase of the 84.2-μm signal was less than 2π/100 and that of the 464-μm signal less than 2π/50. These results are enough to uniquely determine lengths up to 5 m with an accuracy of 1×10^<-7>.
公益社団法人精密工学会の論文
1983-12-05