<報文>クーン精溜法による四塩化珪素の精製
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概要
- 論文の詳細を見る
Kuhn's method was found to be the most effective of the distillating process, but there are few experimental results published on the Kuhn's distillation processing of silicon tetrachloride as a raw material for semiconductor grade silicon. The present authors designed and built an experimental Kuhn's distillating equipment and determined its operating conidtions. Spectroscopic analysis of silicon tetrachloride purified by this process was carried out, and as a result it was found that the kuhn's process can be applied effectively to the purification of silicon tetrachloride. These results are given in four figures and three tables in the following paper.
- 東北大学の論文
- 1960-08-25