新電極系におけるガードフィルムの厚さと静電容量の測定精度の関係についての考察

概要

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In the measurement of dielectric properties, 3-terminal electrode system usually be used which consists of main electrode, high voltage electrode, and guard electrode. The guard electrode has two importance role: one is to measure only the bulk current of the film specimen without the surface current from high voltage electrode to main electrode, and another main electrode is improve electric field disturbance around main electrode edge, which we call "edge effect". In order to measure the dielectric properties of film specimen with minimizing "edge effect", we developed new electrode system. This electrode system is so designed that the guard electrode to covered main electrode by means of a guard film. It can easily carry out the dielectric measurement with high accuracy at high electric field. Is this paper, we examined relationship between guard film thickness and measurement accuracy by both electric field analysis around main electrode edge and the experimental result. We have confirmed from the results of electric field analysis that the thinner the guard film thickness the higher the measurement accuracy. The experimental result also acreed on these analysis.
沼津工業高等専門学校の論文
1992-01-30