RF放電によるNO_x分解過程のシミュレーション

概要

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In this paper, the authors simulate a dissociation process of NO_2 gas by RF discharge. Chemical reation formulars were proposed to infer the dissociation process from change of the number of particles with reation time in our previous paper. The dissociation process simulation based on chemical kinetics is carried out to verify the reliability of the chemical reaction formulas proposed here. The dissociation process of NO_x gases is investigated through experiments using the emission and the infrared spectroscopic methods. The changes of each particle according to the reaction time in the dissociation process simulation are compared with experimental results. Consequently, it is clarified that the chemical reaction formulas show approximately the dissociation process of NO_2 gas by RF discharge.
東海大学の論文