Experimental Analysis of Radial and Axial Structures of DC Glow Discharge
スポンサーリンク
概要
著者
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ナンブ ケンイチ
Professor Institute Of Fluid Science Tohoku University
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ササキ ヒロシ
Research Associate, Institute of Fluid Science, Tohoku University
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タカハシ マサヨシ
Technician, Institute of Fluid Science, Tohoku University
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タカハシ マサヨシ
Technician Institute Of Fluid Science Tohoku University
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ササキ ヒロシ
Research Associate Institute Of Fluid Science Tohoku University
関連論文
- Particle-in-Cell/Monte Carlo Simulation of Pulsed Chlorine Discharge
- Coulomb-Collision Incorporated Simulation of a Rapid Expansion of Fully Ionized Plasmas
- Detailed Modeling of Ion and Neutral Radicals in Radio-Frequency CF4 Discharge
- Effect of Positive-Negative Ion Recombination on RF Chlorine Discharge
- Particle Model for Inductively Coupled Plasma
- DSMC Analysis of Rarefied Flows of Chlorine in a Parallel-Plate RF Etcher for 300mm Wafer
- Dynamics of Three-Dimensional DC Magnetron Discharge Plasma
- Self-consistent Particle Simulation of Axisymmetrical Magnetron Discharge
- Experimental Analysis of Radial and Axial Structures of DC Glow Discharge
- Virtual Plasma Reactor-Computer Simulated RF Etcher