<研究会報告>プラズマによる炭素膜の析出

概要

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Diamond like carbon was prepared by the decomposition of methane in a microwave discharge. The effect of dilution gases, such as hydrogen, argon and helium, on the deposition was examined in the light of the identification of the deposits and the results of plasma diagnostics. When hydrogen was added, diamond like particles including large amounts of hydrogen were obtained. Diamond like films including graphitic carbon and a smaller amount of hydrogen were deposited from the methane-argon plasma. The correlation between the deposit and species present in the plasma is discussed. The deposition of diamond like carbon not including graphitic carbon from the methane-hydrogen plasma was succeeded because of the formation of CH_3 radicals having sp^3 hybrid orbital of carbon for diamond formation from the plasma and a removal of graphitic carbon from the deposit by sputtering.
核融合科学研究所の論文