QMAを用いたTDS測定装置における水素の定量分析

概要

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Thermal desorption spectroscopy (TDS) attached with a quadrupole mass analyzer (QMA) is one of available analyzing systems for investigating the thermal behavior of hydrogen interacting with materials. In the present work, a QMA-TDS analyzing system has been set up so as to measure the hydrogen desorbed from specimen under the ultra-high vacuum condition. The sensitivity in quantitative analyses with this system was examined by using two hydrogen sources, hydrogen gas and titanium hydride (TiH_2) powder, which were known in quantity. As the result, the characterizing values between hydrogen molecules and H_2^+ ion current detected by QMA in this system are 7.18×(10)^<20>H_2/(A・sec) for hydrogen gas and 9.91×(10)^<20>H_2(A・sec) for TiH_2 powder, respectively. The proportionality of H_2^+ ion current to hydrogen partial pressure was also verified under some different conditions of the hydrogen-leakage or desorption rate.
長崎大学の論文