Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate

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概要

• 論文の詳細を見る
• 2013-02-01

著者

• KONDO Kenji

  Tohoku Gakuin University

• OGATA Hiroyuki

  Tohoku Gakuin University

• ICHIJO Kenji

  Tohoku Gakuin University

• HARA Akito

  Tohoku Gakuin University

関連論文

• Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate
• Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate
• Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate

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