Post-Discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source
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概要
- 論文の詳細を見る
- 2012-12-10
著者
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Akiyama Hidenori
Graduate School Of Science And Technology Kumamoto University
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Katsuki Sunao
Bioelectrics Research Center Kumamoto University
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Sakugawa Takashi
Graduate School Of Science And Technology Kumamoto University
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Lu Peng
Graduate School Of Science And Technology Kumamoto University
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Katsuki Sunao
Bioelectrics Research Center, Kumamoto University
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KITAJIMA Seiya
Department of Electrical and Computer Engineering, Kumamoto University
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- Post-Discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source
- Post-Discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source