Characteristics of a DC-Driven Atmospheric Pressure Air Microplasma Jet

概要

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A dc-driven atmospheric pressure air plasma jet has been investigated for some applications, such as local dental treatment, the inner surface treatment of capillaries, stimuli for microorganisms, and the local cleaning of semiconductor devices. The main experimental results are as follows. The discharge in the pulsed mode occurs repetitively despite of the dc input, and the pulsed mode transfers to the continuous mode as the current exceeds a threshold. The measured emission spectrum from the arc column of the air discharge reveals that most energy of activated electrons is used for the excitation of N2 (second positive system bands) and part of the energy for the dissociation of O2. The length of the plasma torch depends on the tube length, inner gap distance, and flow rate. The maximum torch length of about 40 mm is obtained under certain conditions. The spatial distributions of plasma gas temperature are measured and confirmed by the visualization of the gas flow using Schlieren images. Furthermore, surface treatment and decolorization using the generated plasma torch are carried out, focusing on industrial applications.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-08-25