Simultaneous Measurement of Surface Shape and Absolute Optical Thickness of a Glass Plate by Wavelength Tuning Phase-Shifting Interferometry
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概要
- 論文の詳細を見る
- 2012-08-01
著者
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Mitsuishi Mamoru
The University Of Tokyo
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Hibino Kenichi
National Institute Of Industrial Science And Technology
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Sugita Naohiko
The University Of Tokyo
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KIM Yangjin
The University of Tokyo
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LEE Sangyu
LG Electronics
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KONDO Yohan
National Institute of Industrial Science and Technology
関連論文
- Study on Non-Crack Glass Machining by Means of UV Laser with Absorbent(Laser processing (continued))
- Simultaneous Measurement of Surface Shape and Absolute Optical Thickness of a Glass Plate by Wavelength Tuning Phase-Shifting Interferometry
- Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry