Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry

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概要

• 論文の詳細を見る
• 2002-04-01

著者

• Hibino K

  National Institute Of Industrial Science And Technology

• Hibino Kenichi

  National Institute Of Industrial Science And Technology

• TAKATUJI Toshiyuki

  National Institute of Industrial Science and Technology

関連論文

• Simultaneous Measurement of Surface Shape and Absolute Optical Thickness of a Glass Plate by Wavelength Tuning Phase-Shifting Interferometry
• Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry

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