Dependence of Tracking Error Characteristics of In-Line-Type Differential Push-Pull Methods on Arrangement Error of Segmented Gratings
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概要
- 論文の詳細を見る
- 2011-10-01
著者
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Nakai Kenya
Advanced Technology R & D Center Mitsubishi Electric Corp
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Shinoda Masahisa
Advanced Technology R & D Center Mitsubishi Electric Corp
関連論文
- Dependence of Tracking Error Characteristics on Objective Lens Shift for In-Line-Type Differential Push-Pull Methods Using Segmented Gratings
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- Dependence of Tracking Error Characteristics of In-Line-Type Differential Push-Pull Methods on Arrangement Error of Segmented Gratings
- Dependence of Differential Phase Detection Signals on Astigmatism in a Focused Spot