System identification of a dual-stage XY precision positioning table
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概要
- 論文の詳細を見る
- 2009-01-01
著者
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Huang Ming-shyan
Department Of Internal Medicine Kaohsiung Medical College
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Fung Rong-fong
Department Of Mechanical & Automation Engineering And Graduate Institute Of Electro-optical Engi
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Hsu Yi-lung
Department Of Mechanical & Automation Engineering And Graduate Institute Of Electro-optical Engi
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Huang Ming-shyan
Department Of Mechanical & Automation Engineering And Graduate Institute Of Electro-optical Engi
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- System identification of a dual-stage XY precision positioning table