A novel 5DOF thin coplanar nanometer-scale stage

Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University

Institute of Electro-Optical and Materials Science, National Formosa University

Department of Mechanical Engineering, National Chung-Cheng University

Department Of Mechanical Engineering National Chung-cheng University

Institute Of Mechanical And Electro-mechanical Engineering National Formosa University

Institute Of Electro-optical And Materials Science National Formosa University

Department Of Automation Engineering National Formosa University

Department of Automation Engineering, National Formosa University

Institute of Mechanical Engineering, National Chung Cheng University

Institute of Mechanical Engineering, National Chung Cheng University

Department of Mechanical Engineering, National Cheng Kung University

Department of Mechanical Engineering, National Cheng Kung University

Institute Of Mechanical Engineering National Chung Cheng University

Department Of Mechanical Engineering National Cheng Kung University

Department Of Mechanical Engineering National Cheng Kung University

Department Of Automation Engineering National Formosa University