Precision tracking control of a piezoelectric-actuated system
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概要
- 論文の詳細を見る
- 2008-04-01
著者
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JYWE Wen-Yuh
Department of Automation Engineering, National Formosa University
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Shu Yu-ling
Department Of Electrical Engineering National Yunlin University Of Science And Technology
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SHEN Jing-Chung
Department of Automation Engineering, National Formosa University
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CHIANG Huan-Keng
Department of Electrical Engineering, National Yunlin University of Science and Technology
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Shen Jing-chung
Department Of Automation Engineering National Formosa University
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Chiang Huan-keng
Department Of Electrical Engineering National Yunlin University Of Science And Technology
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Jywe Wen-yuh
Department Of Automation Engineering National Formosa University
関連論文
- A novel 5DOF thin coplanar nanometer-scale stage
- Precision tracking control of a piezoelectric-actuated system