Ab Initio Molecular Orbital Study on Acceleration Mechanism of Silane Plasma Chemical Vapor Deposition by Diborane
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概要
- 論文の詳細を見る
- 2011-05-25
著者
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Sato Kota
Department Of Advanced Materials Chemistry Yokohama National University
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KUBOTA Yasuyo
Department of Advanced Materials Chemistry, Yokohama National University
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Kubota Yasuyo
Department Of Advanced Materials Chemistry Yokohama National University
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