Assessment of GaN Surface Pretreatment for Atomic Layer Deposited High-k Dielectrics

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概要

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2011-05-25

著者

Eddy Charles
Electronics Science And Technology Division U.s. Naval Research Laboratory
Meyer David
Electronics Science And Technology Division U.s. Naval Research Laboratory
Garces Nelson
Global Strategies Group
NEPAL Neeraj
Electronics Science and Technology Division, U.S. Naval Research Laboratory
HITE Jennifer
Electronics Science and Technology Division, U.S. Naval Research Laboratory
MASTRO Michael
Electronics Science and Technology Division, U.S. Naval Research Laboratory
Nepal Neeraj
Electronics Science And Technology Division U.s. Naval Research Laboratory
Hite Jennifer
Electronics Science And Technology Division U.s. Naval Research Laboratory
Mastro Michael
Electronics Science And Technology Division U.s. Naval Research Laboratory

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