Self-Organized Two-Dimensional Vidro-Nanodot Array on Laser-Irradiated Si Surface
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概要
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We report a periodic two-dimensional (2D) array of uniquely shaped dotlike nanoprotrusions (NPs), which simultaneously self-organize on a Si surface under pulsed laser irradiation. The shape of the dotlike NPs can be controlled by adjusting the number of laser pulses. The flask-shaped dotlike NP array is named a vidro-nanodot (VND) array. We present a detailed analysis of the internal structure of VND using high-resolution electron microscopy.
- 2011-05-25
著者
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SAKAGUCHI Norihito
Center for Advanced Research of Energy Conversion Materials, Hokkaido University
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Kato Takahiko
Hitachi Research Laboratory Hitachi Ltd.
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WATANABE Seiichi
Center for Advanced Research of Energy Conversion Materials, Hokkaido University
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Yoshida Yutaka
Division Of Applied Sciences Graduate School Of Engineering Muroran Institute Of Technology
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Watanabe Seiichi
Laboratory Of Integrated Function Materials Center For Advanced Research Of Energy Conversion Materi
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Sakaguchi Norihito
Center For Advanced Res. Of Energy Conversion Materials Hokkaido Univ. Sapporo 060-8628 Jpn
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Sakaguchi Norihito
Center For Advanced Research Of Energy And Materials Faculty Of Engineering Hokkaido University
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Yoshida Yutaka
Division Of Quantum Science And Engineering Graduate School Of Engineering Hokkaido University
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Watanabe Seiichi
Center For Advanced Research Of Energy And Materials Faculty Of Engineering Hokkaido University
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