TEM Characterisation of Silicide Phase Formation in Ni-Based Ohmic Contacts to 4H n-SiC
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概要
- 論文の詳細を見る
- 2011-03-01
著者
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Piotrowska Anna
Institute Of Electron Technology
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CZERWINSKI Andrzej
Institute of Electron Technology
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Kuchuk Andrian
Institute Of Electron Technology
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Katcki Jerzy
Institute Of Electron Technology
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WZOREK Marek
Institute of Electron Technology
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RATAJCZAK Jacek
Institute of Electron Technology
関連論文
- Mesoscopic Phenomena in Microstructures of IV-VI Epilayers
- TEM Characterisation of Silicide Phase Formation in Ni-Based Ohmic Contacts to 4H n-SiC
- PREFACE
- Layer or Strip Resistance Measurement by Electron Beam Induced Current Technique in a Scanning Electron Microscope