Layer or Strip Resistance Measurement by Electron Beam Induced Current Technique in a Scanning Electron Microscope

スポンサーリンク

概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2007-05-01

著者

• CZERWINSKI Andrzej

  Institute of Electron Technology

• Katcki Jerzy

  Institute Of Electron Technology

• RATAJCZAK Jacek

  Institute of Electron Technology

• PLUSKA Mariusz

  Institute of Electron Technology

• SZERLING Anna

  Institute of Electron Technology

関連論文

• TEM Characterisation of Silicide Phase Formation in Ni-Based Ohmic Contacts to 4H n-SiC
• PREFACE
• Layer or Strip Resistance Measurement by Electron Beam Induced Current Technique in a Scanning Electron Microscope

スポンサーリンク